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Effects of the cap layer on the properties of ALN barrier HEMT grown on 6-inch Si(111) substrate
Yuanyang Xia,Youhua Zhu,Chunhua Liu,Hongyuan Wei,Tingting Zhang,YeehengLee,TinggangZhu,Meiyu wang,Li Yi and MeiGe
IOP Publishing Mater.Res.Express 7(2020)065902